11 results
Fine Keyed Alignment and Bonding for Wafer-Level 3D ICs
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F10-05
- Print publication:
- 2006
-
- Article
- Export citation
Evolution of Surface Morphology During Cu(TMVS)(hfac) Sourced Copper CVD
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 612 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, D9.16.1
- Print publication:
- 2000
-
- Article
- Export citation
Conformality and Composition of Films Deposited at Low Pressures
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 389 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 95
- Print publication:
- 1995
-
- Article
- Export citation
Growth Morphology of Ag Islands on GaAs (110) at Low Coverage: Monte Carlo Simulations
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 355 / 1994
- Published online by Cambridge University Press:
- 21 February 2011, 101
- Print publication:
- 1994
-
- Article
- Export citation
Simulation of Collimated Titanium Nitride Physical Vapor Deposition using EVOLVE
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 547
- Print publication:
- 1994
-
- Article
- Export citation
The Impact of Gas Phase and Surface Chemical Reactions on Step Coverage in Lpcvd
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 334 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 471
- Print publication:
- 1993
-
- Article
- Export citation
Deposition of Tungsten Silicide Barrier Layers and Tungsten in Rectangular Vias
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 181 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 517
- Print publication:
- 1990
-
- Article
- Export citation
Mechanism of Plasma-Enhanced Deposition of Silicon Dioxide from Teos/O2 Mixtures
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 204 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 495
- Print publication:
- 1990
-
- Article
- Export citation
Modified Line-of-Sight Model for Deposition of Tungsten Silicide Barrier Layers
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 181 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 603
- Print publication:
- 1990
-
- Article
- Export citation
Implications of Rapid Thermal Processing for Step Coverage in Low Pressure Chemical Vapor Deposition
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 146 / 1989
- Published online by Cambridge University Press:
- 25 February 2011, 173
- Print publication:
- 1989
-
- Article
- Export citation
Composition Variation Between Cu-Ni Crystallites using TEM and EDS
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 111 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 191
- Print publication:
- 1987
-
- Article
- Export citation